Evolution analyzers parameters semiconductors for three types of critical measurement of semiconductors – Part II

Posted on July 29, 2010, 2:49 pm

To replace the traditional methods IV, DC, various implementations of high speed (ie pulsed) IV techniques have been developed for applications such as characterization of high-k dielectrics and Silicon-On-Insulator (SOI) test cooler. If the test of SOI devices with traditional techniques IV, DC, their insulating substrates cause them to retain self-heat generated by the test signal, the slope of their measured characteristics, the testing of pulsed signals reduce this effect. Similar problems arise in testing high-k gate structures for CMOS devices, nanotechnology devices, solar cells, and many materials using traditional technologies pointe.Systèmes High-Speed-Pulse/Measure. Early test systems high-speed-pulse/measure generally involved external pulse generator, an oscilloscope, multi-channel, specially designed interconnect hardware and software to integrate and control instruments. Unfortunately, this approach tends to create latency, which complicates the coordination of the signal source and functions mesure.Selon instruments and how they were integrated, it may also impose limits on how the pulse short-cycle of such rights could be. Despite these limitations, users of these systems soon pulsed IV test was not slow to apply them to a variety of other tasks of characterization, including testing of non-volatile memory, ultra-fast NBTI reliability testing and many other applications.Compte view of their dynamic range somewhat limited, these systems remain something of a specialized technology. To become a public test technology, the next generation of ultra-rapid IV test systems would provide a source of considerable extent and dynamic range. This meant that they should be able to source voltage sufficient to characterize flash memory devices, and tensions low enough to handle the latest processes CMOS.Par example, consider a device in an embedded flash CMOS process -The flash device may require up to 40V for the program, but operates on two CMOS processes. 5V, so that the test system used must be able to provide voltages for both requirements. He also needs to have a wide range enough power to handle the new technology, and rise time fast enough and long pulse width sufficient to cover a wide range of applications. It should be simple to use and maintain a system interconnect that allow the system to provide accurate results so fiable.La new generation of analyzers parameter. Semiconductor parameter analyzers have evolved to address many of these testing problems. Now, it is possible to find test systems that combine DC IV, CV and ultra-fast capacity test pulse IV. For example, the Keithley Model 4200-SCS system, model 4225-PMU ultra-rapid IV module has been added to the DC IV and CV measurement modules. Thus, the three types of measures can be integrated in a single test that is optimized for advanced applications such as Flash, PCRAM, and other non-memory tests volatileessais isotherms average power devices entreprisestests Research materials for CMOS level, such as high-dielectric kNBTI / PBTIessais LDMOSEssais reliability testing of III-V devices such as GaAsNaturellement, the computer operating system and library for testing a test system similar integrated should help manage a wide range of test protocols, and quickly switch between three different types of test. An example of this is the Keithley Test Environment Interactive (KTEI) operating system, which provides a single test environment that allows a user to combine measurements made with different types of instruments in a test sequence using unique.En plug-in modules for the chassis of the equipment in an analyzer settings, the test system can be easily optimized to meet specific applications or sets of applications. Equally important, as new applications come, a modular architecture allows system updates of cost-effectiveness. For example, the Model 4200-SCS system, manufacturers can use to share the medium and Source-Measure high power DC IV measurements, an optional capacity meter for measuring CV and an ultra-fast (pulsed ) IV module for high action pulse vitesse.Ainsi, the latest generation of parameter analyzer offers users a complete solution for any application such as charge pumping, because the test system can be configured for the generation pulse ultra-fast and sensitive measures dc power. The test libraries include predefined tests for making the most common charge pumping measurements, as a base voltage sweep or pulse sweep voltage pulse amplitude. In the case of the tests of solar cells, integrated and IV CV measurement capability can perform a wide range of measures, including capacity-frequency (CF), trainability level profiling (DLCP) four probes resistivity (?, ?), and the Hall voltage (VH). In addition, the software automates the steps and provides an analysis of the limits résultats.Repousser instrumentation. While it is important for a test system for managing the daily measures of modern devices and materials, development of advanced technologies often takes longer. This makes parameter analyzers with open system architectures even more important. To meet the needs of technology, Model 4200-SCS allows users to modify any of the measures in its test libraries, such as CV, Ct, and Cf measurements This opens the door to more testing and custom analysis, such as that required for solar cells, high and low k structures, MOSFETs, BJTs, diodes, III-V compound devices, carbon nanotubes (CNT) devices, doping profiles, TOX, and Test carrier lifetime, and the junction, pin to pin, and measures of interconnection capacity. the system speed and flexibility of the material are also important, including the ability to add external instruments without sacrificing speed and performance measurement. Many new tests IV ultrafast laboratory that users want to perform, as the pumping load and NBTI tests, may require greater sensitivity to current standard module provides a tool (eg, Keithley Model 4225-PMU ). This may require the addition of a preamp externe.Pour such a request, the optional Model 4225-RPM Remote Amplifier / Switch for parameter analyzer Keithley offers more low current ranges that extend current sensitivity of the system by tens of picoamps. It also reduces the effects of cable capacity and supports automatic switching between the module based system needs to ultrafast pulses, the module resumes, and SMU modules to perform different types of tests on the fly. It is not necessary to disconnect the wiring of a module and then reconnect to a different instrument. These features reduce the system latency test and improve débit.analyseurs parameter generally older were designed for specific types of testing in the application space current-sensitivity/measurement-time, such as Ultra-fast (UF) in NBTI testing statistical process control (SPCT), and even higher speeds in tests PCRAM. The traditional IV SMU can source DC currents and the height of about 1A and descend about one picoamp. Although the addition of a remote preamplifier allows the resolution of signals as low as 0. 1FA, the best speed is about 10 milliseconds. In contrast, the model 4225 from Keithley-PMU module ultrafast IV can take a measure as little 10ns, which is essential to characterize the recovery unit. Its optional remote amplifier / switch extends the current resolution of the module down to tens of picoamps, slightly above the limit set by Johnson noise produced by the test apparatus. Part III of this article three parties will discuss wiring considerations for different types of tests. This may be just as important as building a tool to achieve optimal throughput and signal integrity.